Tool Order: SEMCO wins post-ion implant anneal technology order on its DF6200 platform

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  PV equipment specialist SEMCO Group is to supply its latest LYTOX technology to an unidentified solar cell producer to carryout post-ion implantation damage annealing.

PV equipment specialist SEMCO Group is to supply its latest LYTOX technology to an unidentified solar cell producer to carryout post-ion implantation damage annealing.

SEMCO said that its latest design of its DF6200 high-throughput furnace platform equipped with the LYTOX reduced pressure post-implant activation and passivation technology also included its high throughput cassette to cassette wafer transfer automation system that enables the loading of 1,400 horizontal wafers per furnace tube for high-volume production, typically N-type monocrystalline and bifacial solar cells. 

Having recently teamed with process measurement specialist, Aurora Solar the order includes Aurora’s resistance measurement system and software. 

SEMCO noted that the customer had previously used its LYDOP-POCl3 systems, used for diffusion to realize the p-n junction and build-in voltage on solar cells.

N-type monocrystalline and bifacial solar cells are expected to gain increased acceptance by high-efficiency focused solar cell and module producers.